MNE 2016 Micro Nano Graph Contest

“A good Micrograph is worth more than the MegaByte it consumes.”

Entries Presented by Dr. John Randall – Zyvex Labs

        Sponsored by

In 2016, 75 entries were received from 13 Countries and 3 Continents.
There were many outstanding micrographs. The work represented in the submitted
micrographs covered a wide range of fields including micro mechanical, photonic,
and integrated circuit fabrication, chemical and dry etching,biological samples,
material science experiments and, of course, e-beam, ion beam, and nano imprint lithography experiments.

RULES

• Entries have to be of a single image taken with a microscope and not significantly altered.
• There is no restriction with respect to the subject matter.
• Electron and ion micrographs have to be black and white.

JUDGES

Michael Stifter -World Champion in Botball robotics - Austria
Maan Alkaisi -MacDiarmid Institute Ð New Zealand
Falco van Delft Ð Nanovalk - The Netherlands
Alex Liddle Deputy Director CNST, NIST - USA

AWARDS

First Prize
Second Prize
Third Prize

The judges also selected 10 Honorable Mentions.

2016 included the MNE People's Choice award where all attendees could vote on their favorite micrograph.
People's Choice Award

COMMENTS:

Winners and Honorable Mentions will be displayed in perpetuity at www.ZyvexLabs.com


All 2016 Entries


 First Prize

 

"Escape of the pod people"

Description: Metallic nano-flowers generated by IBE and RIE of an Al-Ti-Au-Ti coated wafer, patterned with standard photolithography. After etching, the resist is removed, the stress in the fences is released leading to the formation of the wavy stem/leaves of the flower.
Magnification (3"x 4" image): 7000 X
Instrument Zeiss Merlin
Submitted by: Valentin Flauraud & Benoit Desbiolles
Affiliation: EPFL LMIS1 Switzerland



 Second Prize

 

"No Fluffy, That is High Voltage"

Description:
This nice structure crystallized after development on the edge of a Fresnel zone plate made from HSQ
Magnification (3"x 4" image): 44000 X
Instrument: SEM Zeiss Supra 55VR
Submitted by: Felix Marschall
Affiliation: Paul Scherrer Institut



 Third Prize

 

"I worked my butt off for this nice SEM"

Description: Reflow of positive tone resist
Magnification (3"x 4" image): 600 X
Instrument: Fei InspectS50
Submitted by: Arne Schleunitz & Susanne Gruetzner
Affiliation: micro resist technology GmbH



 MNE People's Choice Award - The Judges also selected this micrograph for an honorable meniton award.

 

"Tiny Stonehenge"

Description: The skeleton of copper pillars. After electroplating, silicon substrate is removed leaving the copper-filled through-silicon vias.
Magnification (3"x 4" image): ??
Instrument: ZEISS Supra 40VP SEM
Submitted by: Hoa le Thanh
Affiliation: Technical University of Denmark



 Honorable Mention

 

"Lightly Plucked"

Description: Buckling of clamped-clamped Nickel beams due to the heating by a red laser.
Magnification (3"x 4" image): 10X
Instrument: Carl Zeiss SEM
Submitted by: Tom Larsen
Affiliation: ANEMS - EPFL


 Honorable Mention

 

"Escher reprinted"

Description: Magnification (3"x 4" image): 700 X
Instrument: Supra 40VP SEM
Submitted by: Suhith Hemanth
Affiliation: DTU, Nanotech



 Honorable Mention

 

"No please, not another micrograph contest"

Description: Piece of peeled off resist mask - found this little fellow at the edge of deep silicon etch structures. Make sure you got the parachute before jump!
Magnification (3"x 4" image): 1.6 KX
Instrument: Zeiss Gemini Supra 25
Submitted by: Katarzyna Korwin-Mikke
Affiliation: Oxford Instruments



 Honorable Mention

 

"Trump Casino"

Description: After electron beam lithography and evaporation of gold, the last lift-off processing step went catastrophically wrong with the delamination of most structures bringing chaos into the nanoworld of plasmonic antennas!
Magnification (3"x 4" image): 32000 X
Instrument: Zeiss Merlin
Submitted by:Valentin Flauraud
Affiliation: EPFL LMIS1 Switzerland



 Honorable Mention

 

"Tiny-Stonehenge"

Description: The skeleton of copper pillars. After electroplating, silicon substrate is removed leaving the copper-filled through-silicon vias.
Magnification (3"x 4" image): ??
Instrument: ZEISS Supra 40VP SEM
Submitted by: : Hoa le Thanh
Affiliation: Technical University of Denmark



 Honorable Mention

 

"Nano-Louvre"

Description: Replica of the glass pyramids in the courtyard of the Louvre (Paris) in a scale of 1: 8.000.000. The basement and the fountains are a FIB-cut, the 3D-structures (branch sizes between 25 and 70 nm) consist of platinum and carbon. This image demonstrates the 3D-Nanoprinting capabilities of Focused Electron Beam Induced Deposition (FEBID). Compare it to the real Louvre!
Magnification (3"x 4" image): 5KX
Instrument: FEI Fib Nova200
Submitted by:Robert Winkler
Affiliation: ZFE, Graz Centre for Electron Microscopy



 Honorable Mention

 

"Silicon Shard Horse"

Description: Silicon shards from a broken grating fabricated by deep reactive ion etching resemble a horse.
Magnification (3"x 4" image): 4.5 kX
Instrument: SEM Zeiss Supra VP55
Submitted by: Joan Vila-Comamala
Affiliation: ETH Zurich



 Honorable Mention

 

"African ceremonial mask"

Description: Positive Tone Resist structured by UV-lithography. The African ceremonial mask appeared during reflow.
Magnification (3"x 4" image): 5X
Instrument: : Olympus BX51M
Submitted by: Maria-Melanie Russew
Affiliation: micro resist technology GmbH



 Honorable Mention

 

"Do typewriters dream of selectric sheep?"

Description: Image shows a patterned curved surface fabricated with UV based soft nanoimprint lithography. The sphere has a diameter of around 100µm and the pillar pattern has a period of 2,5µm. The soft stamp deforms around the object and patterns the whole surface.
Magnification (3"x 4" image): ??
Instrument: ZEISS 1540XB CrossBeam
Submitted by: Michael J. Haslinger
Affiliation: Profactor GmbH



 Honorable Mention

 

"And that is why we call the kid Blockhead"

Description : It supposes to be nice carbon cantilevers however during the pyrolysis process, the stress turns them to the curly carbon cantilevers.
Magnification (3"x 4" image): 245 X
Instrument: : Zeiss Supra 40 VP SEM
Submitted by: : Long Nguyen Quang
Affiliation: DTU Nanotech


      

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