ZyVector Lithography Controller 

• 20-bit DSP 
• Provides real-time control of the tunneling feedback loop and bias voltage. and precise tip motion across the surface. 
• Piezo Driver 
• Pre-amp bias range control for Omicron preamp amplified current input Fits Omicron VT STM preamp and PIC cabling. 

Scanning 

• Omicron VT STM: 9500 nm. 
• Minimum scan bit size: 10 pm. 
• Z range: 1.3 μm.
• Minimum bit size: 1 pm. 

System Capabilities 

• Heater station for Sample Preparation 
• Si MBE source 
• Precursor gas dosing chambers

Advanced Position Controls 

• Local piezo tube calibration based on lattice recognition, including determination of lattice angle relative to piezo tube axes. 
• Lattice phase recognition for precise lithography positioning. 
• Creep and Hysteresis position correction (CHC) in xyz. 
• Initial optimization of creep and hysteresis over scan range during installation. (Fine optimization by user required periodically.) 

Hydrogen Depassivation Lithography (HDL) 

• Two spot size modes available: 
  • AP mode ( single-dimer-row line width) 
  • FE mode ( wide line width, rough edges) 

Advanced Scripting Capabilities 

• We provide scripts based on Python for test HDL patterns, creep correction calibration, lithography parameter calibration, etc. 
• User-written scripts can be easily incorporated and run using command line interface or drop-down menu.